客製化設備設計與製作

  • EHPM-200/300

    Offline to Measure pressure of mirra head 200/300. Keep watch out a period of time.

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  • ES-200i

    Pick up wafer from cassette, then put wafer to any plate or measurement's stage. Simple...

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  • ES-300TB

    Pick up wafer from FOUP, then put wafer to any kind of stage.
    Manual open FOUP door. a...

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  • ESDS Multi tank type

    簡易型研磨液及化學液供應系統 : 事先混合好相應比例之研磨液或化學液後，倒入供應槽內，啟動供應系統，供給CMP製程使用。極適合實驗室類型之小型供液應用。

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  • Pad Conditioner ODM

    可依客戶需求改善或開發研磨墊器--增加使用的彈性與依客戶需求客製化功能

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  • ESDS

    簡易型研磨液供應系統 : 事先混合好相應比例之研磨液後，倒入供應槽內，啟動供應系統，供給CMP製程使用。極適合實驗室類型之小型供液應用。

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